# Semiconductor Manufacturing Process

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Advanced chip manufacturing, specifically for 2nm-class and smaller nodes, relies on a supply chain characterized by extreme chokepoints.
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ASML, located in Veldhoven, Netherlands, is the sole global supplier of EUV lithography, with no existing substitute.
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DUV (deep ultraviolet) lithography remains crucial for manufacturing the majority of layers in semiconductor devices.
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### ASML's EUV Shipments and Projections

ASML's EUV Shipments and Projections
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### EUV Lithography Applications

EUV Lithography Applications
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ASML holds an approximate 24.9% stake in Carl Zeiss SMT.
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ASML provides both immersion and dry DUV solutions across i-line (365nm), KrF (248nm), and ArF (193nm wavelengths).
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Manufacturing an advanced chip requires approximately 300 or more distinct tool types, over 500 process steps, and materials from dozens of specialized suppliers.
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Low-NA EUV is utilized for all logic chips at 7nm and below, and its use is increasing for DRAM manufacturing.
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High-NA EUV machines are suitable for 1.4nm-generation logic and 10nm-and-beyond DRAM.
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Carl Zeiss SMT, based in Oberkochen, Germany, supplies the mirror optics for ASML's machines.
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ASML projects approximately 80 EUV systems to be shipped in 2027.
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ASML, Canon, and Nikon are competitors in the DUV lithography market.
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Each High-NA EUV unit costs approximately $380 million.
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ASML intends to ship more than 60 EUV units (combining Low-NA and High-NA) in 2026.
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High-NA EUV (0.55 NA, EXE series) can resolve 8nm features.
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Low-NA EUV (0.33 NA, NXE series) can resolve 13nm features per exposure.
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Ten High-NA EUV systems are currently operational at four customer sites globally.
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ASML's EXE systems have collectively exposed over 1.35 million wafers.
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ASML's order data for 2027 planned deliveries includes 56 Low-NA EUV scanners.
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ASML's order data for 2027 planned deliveries includes 10 High-NA scanners.
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An additional three High-NA EUV systems are in the process of being shipped and installed.
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The 56 Low-NA EUV scanners planned for 2027 deliveries include five units for Intel, seven for Samsung, and up to 20 for SK Hynix.
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